Smart mass flow meter Small volume flow controller Thermal gas mass flow meter
Luɔi & Features
Mass Flow Controller (MFC) ye luɔɔi kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r. Aye tɔ̈u në puɔ̈ɔ̈c ku luɔɔi de semiconductor ku integrated circuit industries, special materials disciplines, chemical industries, ku jɔl ya industries, pharmaceuticals, *** ku vacuum lights. A tɛ̈n yenë a luɔɔi thïn aye: electronic process equipment, wala diffusion, extension, CVD、 Oxidation, plasma etching, sputtering, ion injection; Ku kä ye kek looi, fiber optic melting, micro-reaction devices, mixed gas distribution systems, capillary measurement, gas chromatograph ku kä wɛrɛw ye kek looi.
Indikator Teknik
Ajuiɛɛr (20,30,50,100,200,300,500) SCCM (0~1,2,3,5,10) SLM
A yic +1.5% F.S
Linear +0.5~1.5%F.S.
Luɔɔi + 0.2% F.S
Waktu ye jaabi 10sec Gas Features: (1~4) sec
Tɛmɛ tɛmɛ 0.1~0.5MPa
3Mpa 6Mpa 10Mpa
Tɛmɛ tɛmɛ 0 ~ 70 ℃
Dijital RS485 MODBUS Protocol
Analog DC 0 ~ 5V, 4 ~ 20mA ye gam
Elektrik: SLM
Power supply DC +15V/24V optional, flow meter <50mA, controller <200mA
Kɔmpiye DB15
Lëk 1×10 SCCSHe
Kä ye looi 316L stainless steel
Kä ye kek tɔ̈ɔ̈u Fluororubber, Fine Rubber, Neoprene
Lɔ̈ɔ̈i ë gas Φ3, Φ6, Φ10, 1/8 ", 1/4 ", 3/8 "
Lëk: Mass flow meters ku mass flow controllers ye looi në ɣän ke ɣän ke ɣän ke ɣän ke ɣän ke ɣän ke ɣän ke ɣän ke ɣän ke ɣän ke ɣän ke ɣän ke ɣän ke ɣän ke ɣän ke ɣän ke ɣän ke ɣän ke ɣän ke ɣän ke ɣän ke ɣän ke
Kä ye kek tɛ̈n yenë kek tɔ̈ɔ̈u thïn aye: SCCM (mL/min); SLM ((Standard litre/min)
Smart mass flow meter Small volume flow controller Thermal gas mass flow meter